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Title:
LIQUID CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2013237006
Kind Code:
A
Abstract:

To provide a liquid control device capable of accurately monitoring a vaporization process of liquid while maintaining responsiveness in temperature control.

A liquid control device 10 controls spreading and vaporization of a chemical. The liquid control device 10 includes a body 31 having an upper surface 31c supplied with the chemical, a mesh having a minute structure for promoting spreading of the chemical, and a heater 80 for heating the upper surface 31c from inside of the body 31. In the spreading direction of the upper surface 31c, the liquid control device 10 includes: a first temperature sensor 83 for detecting temperature of a first part inside the body 31 between the supplied position and the heater 80; a second temperature sensor 84 for detecting temperature of a second part inside the body 31 on the opposite side of the first part sandwiching the supplied position between the first/second parts; and a controller 70 controlling a heat generation amount of the heater 80 based on the temperature of the first part and executing a predetermined monitoring processing based on the temperature of the second part.


Inventors:
KOKETSU MASAYUKI
BANDO HIROSHI
Application Number:
JP2012111201A
Publication Date:
November 28, 2013
Filing Date:
May 15, 2012
Export Citation:
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Assignee:
CKD CORP
International Classes:
B01J7/02; H05B3/00
Domestic Patent References:
JPWO2011040067A12013-02-21
JP2011097088A2011-05-12
JP2005057193A2005-03-03
JPH0747201A1995-02-21
JPH11500659A1999-01-19
JPH06232035A1994-08-19
JP2009194246A2009-08-27
JPH07155584A1995-06-20
JP2004363562A2004-12-24
JP2008263244A2008-10-30
JPWO2011040067A12013-02-21
JP2011097088A2011-05-12
JP2005057193A2005-03-03
JPH0747201A1995-02-21
JPH11500659A1999-01-19
JPH06232035A1994-08-19
JP2009194246A2009-08-27
JPH07155584A1995-06-20
JP2004363562A2004-12-24
JP2008263244A2008-10-30
Foreign References:
GB1439603A1976-06-16
GB1439603A1976-06-16
Attorney, Agent or Firm:
Tsuyoshi Yamada
Hiroshi Matsuda