Title:
液体吐出装置
Document Type and Number:
Japanese Patent JP5345917
Kind Code:
B2
Abstract:
To suppress destruction of a piezoelectric element, and improve durability of a piezoelectric device.
The piezoelectric device is formed by laminating a lower electrode 20, a piezoelectric film 30, and an upper electrode 50 in this order on a substrate 10 with a diaphragm structure 60. In a region excluding a predetermined region corresponding to the diaphragm structure 60 on the substrate 10, an interlayer dielectric 40 is prepared between the lower electrode 20 and the upper electrode 50 which are prepared facing each other, and a surface on which the upper electrode 50 is formed is made a flat plane.
COPYRIGHT: (C)2011,JPO&INPIT
Inventors:
Shinkawa Takami
Keiichi Hishinuma
Keiichi Hishinuma
Application Number:
JP2009231733A
Publication Date:
November 20, 2013
Filing Date:
October 05, 2009
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
H03H9/17; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B81B3/00; G01N29/24; H01L41/08; H01L41/09; H01L41/18; H01L41/22; H01L41/332; H01L41/39
Domestic Patent References:
| JP2004304704A | ||||
| JP2009194714A | ||||
| JP2000085124A | ||||
| JP2008187000A |
Foreign References:
| WO2008117700A1 |
Attorney, Agent or Firm:
Yanagita Seiji
Go Sakuma
Go Sakuma
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