LIQUID DISCHARGING DEVICE AND LIQUID DISCHARGING METHOD

Japanese Patent JP2021194590

A

To prevent the impairment of suction performance or discharge performance of a function fluid due to the aggregation and adhesion of a solution in the function fluid to a liquid discharge pipe that is connected to a liquid receiving portion receiving the function fluid discharged from a discharge head or sucking the function fluid in the discharge head.SOLUTION: A liquid discharge device discharges a function fluid from a discharge head. The discharge head is provided with a discharge hole discharging droplets of the function fluid to work. The liquid discharge device has a liquid discharge pipe that sucks the function fluid in the discharge head or is connected to a liquid receiving portion receiving the function fluid discharged from the discharge head, and a supply pipe that supplies a cleaning fluid flowing out the function fluid in the liquid discharge pipe, to the liquid discharge pipe.SELECTED DRAWING: Figure 4

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SHEN SHENG-MING
HAYASHI TERUYUKI
OSHIMA KIYOMI
MATSUMOTO MAKOTO

JP2020102480A

December 27, 2021

June 12, 2020

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TOKYO ELECTRON LTD

B05C5/00; B05C11/10; B05D1/26; B05D3/00; B05D3/10; B41J2/01; B41J2/17

Tetsuo Kanamoto
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine

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