To provide a liquid drop delivery apparatus capable of suitably vaporizing a solvent of a function liquid drop drawn on a work while eliminating a thermal influence to the work and the function liquid, a manufacturing method for an electro-optical apparatus, an electro-optical apparatus and electronic equipment.

The liquid drop delivery apparatus is provided with a drawing means for performing drawing by delivering the function liquid drop on the work while relatively moving the function liquid drop delivery head introducing the function liquid; an air blowing out port facing to the work following the moving function liquid drop delivery head and dry air of ordinary temperature for drying the function liquid on the work; an air suction port for sucking the dry air of ordinary temperature blown to the work; a chamber room for storing these; and a chamber apparatus having a clean air feeding unit having an air feeding side communicated with an air feeding chamber in a ceiling of the chamber room and an air suction side communicated with an air discharge port of the chamber room. The air blowing out port is communicated with the air feeding chamber in the ceiling and the air suction port is communicated with the outside of the chamber room through an exclusive air discharge port.