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Title:
LIQUID DROPLET DISCHARGE HEAD, LIQUID CARTRIDGE HAVING THE LIQUID DROPLET DISCHARGE HEAD, IMAGE RECORDER WITH THE LIQUID DROPLET DISCHARGE HEAD, AND METHOD FOR MANUFACTURING THE LIQUID DROPLET DISCHARGE HEAD
Document Type and Number:
Japanese Patent JP2014008729
Kind Code:
A
Abstract:

To provide a liquid droplet discharge head for performing an inspection of dynamic characteristics of an inspection object in a process immediately after preparing the inspection object.

A liquid droplet discharge head 1 at least comprises: an actuator composed of a diaphragm 4 and a piezoelectric element 18 for compression; a compression liquid chamber 6 provided directly under the actuator; and a liquid resistance part 7 which specifies an inflow amount of liquid to flow in the compression liquid chamber 6, and discharges liquid droplets by driving the actuator. An inspection gap 23 for allowing distortion displacement of a diaphragm component film 4' is formed in a free area except a compression liquid chamber formation area and a liquid resistance part formation area of a silicon single crystal substrate 2' in a midway process of manufacturing the liquid droplet discharge head 1 and directly under the diaphragm component film 4'.


Inventors:
KURODA TAKAHIKO
Application Number:
JP2012148313A
Publication Date:
January 20, 2014
Filing Date:
July 02, 2012
Export Citation:
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Assignee:
RICOH CO LTD
International Classes:
B41J2/055; B41J2/045; B41J2/16
Attorney, Agent or Firm:
Tamio Nishiwaki