To provide an extremely reliable liquid droplet ejection head by enhancing the etching resistance of a joined surface between a first substrate and a second substrate.
In the liquid droplet ejection head 1, the second substrate 9 having a pressured liquid chamber 6 communicating with a nozzle hole 2 of the first substrate 3, and a common liquid chamber 4 for supplying ink to the pressured liquid chamber 6, and provided with a piezoelectric element 7 and a diaphragm 8 generating liquid droplet ejection energy for ejecting ink from the nozzle hole 2 for the ink with which the pressured liquid chamber 6 is filled, and a third substrate 12 having a common liquid supply channel 11, communicating with a liquid supply through-hole 10 to which the ink is supplied from the outside and also communicating with the common liquid chamber 4 are joined to be layered. The head 1 is provided with a protective layer 19 to cover a range including at least the joined surface C of the second and third substrates 9 and 12 which are joined on an inner wall side of the common liquid chamber 4 and the common liquid supply channel 11 which communicate with each other.
JP2004042302 | LIQUID EJECTOR |
WO/2014/003772 | FABRICATING A FLUID EJECTION DEVICE |
JPS61106259 | INK DROPLET JET DISCHARGING DEVICE |
JP2009214522A | 2009-09-24 | |||
JP2003159801A | 2003-06-03 | |||
JP2009255415A | 2009-11-05 | |||
JP2006044083A | 2006-02-16 |
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