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Title:
LIQUID FEEDER
Document Type and Number:
Japanese Patent JP2003049778
Kind Code:
A
Abstract:

To provide a liquid feeder that can quantitatively discharge a trace quantity of liquid with more accuracy by using a pressure sensor with high corrosion resistance, responsiveness and heat resistance.

The liquid feeder 50 changes the volume of a pump chamber 55 by driving a diaphragm 52 to suction a chemical from an input port 81 and discharge the chemical to an output port 82. A wall surface of the pump chamber 55 is partly formed by a sensor surface 72 of the pressure sensor 70, and the sensor surface 72 is provided with a fluorine resin 71 by thermo- compression bonding. The pressure sensor 70 measures a back pressure generated by, for example, an orifice arranged outside the output port 82, and passes feedback to a controller 64. According to the measured value, the controller 64 controls a solenoid-operated proportioning valve 65 for driving the diaphragm 52.


Inventors:
ITO TOMOHIRO
OSUGI SHIGERU
KAGOHASHI HIROSHI
Application Number:
JP2001238931A
Publication Date:
February 21, 2003
Filing Date:
August 07, 2001
Export Citation:
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Assignee:
CKD CORP
International Classes:
F04B13/00; B05C11/10; F04B43/02; F04B43/06; H01L21/027; (IPC1-7): F04B43/02; B05C11/10; F04B13/00; F04B43/06; H01L21/027
Domestic Patent References:
JPH11343978A1999-12-14
JPH02107776A1990-04-19
JPS6285185A1987-04-18
Attorney, Agent or Firm:
Takashi Tomizawa (2 outside)



 
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