To provide a liquid immersion exposure apparatus capable of suppressing deterioration in performance due to a cover member in exposing a substrate via a liquid.
The liquid immersion exposure apparatus is provided with a first optical member having an exit surface via which an exposure beam is emitted; a first movable body movable with respect to the first optical member while holding a substrate; a cover member movable with movement of the first movable body and capable of retaining a liquid in a space formed between the exit surface and the cover member when it is at a position opposite to the exit surface; a first holding section provided on the first movable body and holding the cover member; and a transport section for removing the cover member from the first holding section and moving the cover member independent of the first movable body.
Tadashi Takahashi
Kazuya Nishi
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