Title:
LIQUID MANAGING DEVICE
Document Type and Number:
Japanese Patent JPH10143255
Kind Code:
A
Abstract:
To provide a liquid managing device capable of dealing with even a cleaning liquid of organic solvent and automated in the replenishment or exchange of cleaning liquid.
The concentration of contaminant component in a resist release liquid is measured by a resist concentration detecting part 6, solenoid valves 15 and 17 under the control of a control part 12 are opened/closed by a signal from this resist concentration detecting part 6, and the quantity of contaminant resist release liquid to be discharged from a resist release tub 2 and the quantity of fresh liquid to be supplied form a resist release liquid tank 13 into the resist release tub 2 are controlled.
Inventors:
TSUNOKAKE YASUHIRO
FUNAHASHI TATSUYA
KAWAGUCHI KOZO
FUNAHASHI TATSUYA
KAWAGUCHI KOZO
Application Number:
JP30537996A
Publication Date:
May 29, 1998
Filing Date:
November 15, 1996
Export Citation:
Assignee:
TOKICO LTD
International Classes:
G05D21/00; (IPC1-7): G05D21/00
Attorney, Agent or Firm:
Masatake Shiga (2 outside)