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Title:
LIQUID MATERIAL DISCHARGE DEVICE, CONTROL METHOD FOR JET VOLUME OF LIQUID MATERIAL AND ELECTRIC PART MANUFACTURING METHOD USING THE CONTROL METHOD
Document Type and Number:
Japanese Patent JP3731863
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To apply the actual measurement of the jet volume during the coating or the like in a liquid material jet method and a device thereof for jetting the liquid material of the given amount to a subject to be jetted and control the very small jet volume.
SOLUTION: The device is used for adding pressure to a syringe, holding the liquid material, and the configuration of the liquid material jetted out of a jet outlet of the syringe is photographed, and based on the volume, the pressure and the applying time to be added to the syringe is controlled based on the volume thus found.


Inventors:
Yoshifumi Otsu
Toru Mizuno
Yoshihiro Onoseki
Application Number:
JP2000246289A
Publication Date:
January 05, 2006
Filing Date:
August 15, 2000
Export Citation:
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Assignee:
tdk Corporation
International Classes:
B05C5/00; G01F13/00; B05C11/00; B05D3/00; B05D7/24; H01L21/56; (IPC1-7): B05C5/00; B05C11/00; B05D3/00; B05D7/24; G01F13/00; H01L21/56
Domestic Patent References:
JP6315659A
JP2000061379A
JP63115470U
JP8229119A
JP5045354A
JP4334569A
JP64019127U
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa