Title:
液体材料気化装置
Document Type and Number:
Japanese Patent JP5475817
Kind Code:
B2
Abstract:
A liquid material vaporizer comprises a gas-liquid mixing section (1) for mixing a liquid material (LM) and a carrier gas (CG) to generate a gas-liquid mixture (GL); a heating type vaporizing section (2) for vaporizing the gas-liquid mixture (GL) from the gas-liquid mixing section (1) and exhausting outside with an assistance of the carrier gas (CG) a gas generated by the vaporization; a connecting section (3) for making a connection between the gas-liquid mixing section (1) and the vaporizing section (2), the connecting section (3) having inside a flow path for the gas-liquid mixture(GL); and a connecting section cooling section (4) for cooling the connecting section(3). Thus, the liquid material vaporizer which performs suitable vaporization by preventing residue from being generated even in the case of vaporizing a liquid material composed of a plurality of materials having different boiling points.
Inventors:
Nishikawa Ichiro
Takeshi Kono
Takeshi Kono
Application Number:
JP2012054917A
Publication Date:
April 16, 2014
Filing Date:
March 12, 2012
Export Citation:
Assignee:
HORIBA STEC Co., Ltd.
International Classes:
C23C16/448; B01J7/00; H01L21/205; H01L21/31
Domestic Patent References:
JP2005057193A | ||||
JP2005026599A | ||||
JP11006066A | ||||
JP2005327864A | ||||
JP2004002906A | ||||
JP2004119486A | ||||
JP2005533178A | ||||
JP5090341B2 |
Attorney, Agent or Firm:
Ryuhei Nishimura
Akiko Sato
Saito Shindai
Akiko Sato
Saito Shindai
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