To prevent the fluctuation, etc., of film quality resulting from the abnormality of a liquid material surely, by transferring the liquid material up to a vaporizer by a liquid-feed line, and installing a state detecting means capable of detecting the state of the liquid material during device operation.

One ends of liquid-feed lines 4A-4D are disposed at places, where the liquid-feed lines are dipped in liquids in each material vessel 2A-2C or a solvent exclusive vessel 2D, the other ends are collected at a collecting place X, and flow-controllable proportional valves 5A-5D are interposed in the upstream of the collecting place X respectively and each liquid material A-D is transferred up to the vaporizer 12. The defective operation of a check valve for a pump 10 and the presence, etc., of the generation of bubbles in the liquid materials A-D and D are confirmed at the pressure of the liquid materials A-C and D monitored by a pressure sensor PS at that time. Attenuation in any extent in light transmitted through the liquid materials A-D from a light source having specified luminous intensity is obtained by detecting absorbance by a cell CL for spectrophotometric analysis.