PURPOSE: To detect horizontality in an epitaxy device of a substrate by mounting a pair of bundle fibers into an inner tube brought into contact with a substrate fixture and observing the state of the inclination of the substrate by a specific operation.
CONSTITUTION: A pair of bundle fibers 17, 18 are set up into an inner tube 16 brought into contact with a substrate jig 14, beams are projected to one bundle fiber 17, and beams reflected caused by a collision with a substrate fitting section in the substrate fixture 14 of incident beams are observed by the other bundle fiber 18. Beams are projected to the bundle fiber 17 on the small diameter side in the bundle fibers 17, 18 by employing a proper white beam source, and the reflection of incident beams introduced from the peripheral section of a substrate 12 held by the substrate jig 14 is observed with the bundle fiber 18 having a large diameter, thus detecting the horizontal installation of the substrate 12.
ITO MICHIHARU
YAMAMOTO KOSAKU
HAMASHIMA SHIGEKI
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