Title:
LIQUID PRESSURE CONTROL DEVICE
Document Type and Number:
Japanese Patent JP3887287
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a liquid pressure control device for controlling the liquid pressure of the liquid discharged from a nozzle with high accuracy.
SOLUTION: A liquid housing pan 14 is housed in a hermetically closed tank 13 and the liquid is always allowed to overflow from the opening part 14a of the liquid housing pan 14. By this constitution, the head difference between the overflow surface 16 in the liquid housing pan 14 and a nozzle 22 becomes constant.
Inventors:
Kazutoshi Yasu
Toru Niwa
Toru Niwa
Application Number:
JP2002260425A
Publication Date:
February 28, 2007
Filing Date:
September 05, 2002
Export Citation:
Assignee:
CKD Corporation
International Classes:
B05C5/00; B05C11/10; H01L21/027; (IPC1-7): B05C11/10; B05C5/00; H01L21/027
Domestic Patent References:
| JP2001300392A | ||||
| JP2001230191A | ||||
| JP5056269U |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda
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