Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
LIQUID PRESSURE TYPE MOVEMENT MECHANISM
Document Type and Number:
Japanese Patent JPH01220701
Kind Code:
A
Abstract:

PURPOSE: To carry out a minute movement precisely and improve the operation ability of the mechanism by providing a moving base body on one end of a liquid cylinder with a large section and connecting the liquid cylinder with the large section to a liquid cylinder with a small section through a liquid transfer pipe, in the mechanism in the title used in a scanning type electron microscope and the like.

CONSTITUTION: A moving base body 1 is provided on one end of a liquid cylinder 7 with a large section, which is connected to a liquid cylinder with a small section 10 through a liquid transfer pipe 8. Thus, the liquid cylinder 7 with the large section can be drive by changing the volume of the liquid cylinder 10 with the small section. In this case, the movement amount of the moving base body 1 complies with the ratio between the sectional areas of both cylinders 7, 10. Therefore, a minute movement can be carried out precisely.


Inventors:
Hojo, Hisao
Application Number:
JP1988000043016
Publication Date:
September 04, 1989
Filing Date:
February 25, 1988
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
VACUUM PROD KK
International Classes:
G02B21/26; F15B7/00; G01Q10/02; H01J37/28; (IPC1-7): F15B7/00; G02B21/26; H01J37/28
Domestic Patent References:
JPS61165003A



 
Previous Patent: SHOCK ABSOBER FOR FORK LIFT

Next Patent: SERVO-CONTROL DEVICE