Title:
LIQUID PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP3910827
Kind Code:
B
Abstract:
PROBLEM TO BE SOLVED: To provide appropriate maintenance, even if multiple developing devices are stacked.
SOLUTION: A rail 107 is provided in X direction in a frame 15. A stage is provided below a cup housing part 70, which is mounted in the frame 15 with the cup housing part 70 fixed on the stage. The stage is provided freely movable on the rail 107. Both an exhaust pipe 80, which exhausts the atmosphere in the cup housing part 70 and an exhaust duct 36, which evacuates the atmosphere out of a coating/developing system are provided detachably. Thus, the cup housing part 70 is pulled freely out of the frame 15, without being constrained by the exhaust pipe 80, etc., for proper maintenance.
Inventors:
Nagamine, Shuichi
Application Number:
JP2001000347139
Publication Date:
February 02, 2007
Filing Date:
November 13, 2001
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G03F7/30; H01L21/027; H01L21/00; (IPC1-7): H01L21/027; G03F7/30