Title:
液体精製カートリッジ及び液体の精製方法
Document Type and Number:
Japanese Patent JP7081974
Kind Code:
B2
Abstract:
To provide a liquid purification cartridge for removing impurities such as metals in water, an aqueous solution or an organic solvent used for a semiconductor production process excellent in removal performance of both of impurities such as ionic metals and impurities such as fine particle metals, having a large treatment flow rate, and having a long life.SOLUTION: The liquid purification cartridge 1a includes: a cartridge container 10 formed with an introduction opening 4 of a liquid to be treated and a discharge opening 5 of a treated liquid, and filled with a treatment material; an ion exchanger 2 filled in an upstream side of a treatment material-filled region 9a, 9b inside the cartridge container; and a precision filtration membrane 3 filled in a downstream side of the treatment material-filled region inside the cartridge container, where the ion exchanger is a monolithic organic porous ion exchanger.SELECTED DRAWING: Figure 5
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Inventors:
Daisaku Yano
Kyohei Tsutano
Shinichi Ohashi
Kyohei Tsutano
Shinichi Ohashi
Application Number:
JP2018090530A
Publication Date:
June 07, 2022
Filing Date:
May 09, 2018
Export Citation:
Assignee:
Organo Corporation
International Classes:
B01D61/14; B01J47/024; B01D61/16; B01J39/19; B01J41/13; B01J47/028; C02F1/42
Domestic Patent References:
| JP2010240642A | ||||
| JP2010234357A | ||||
| JP2013255921A |
Foreign References:
| US20090008318 |
Attorney, Agent or Firm:
Patent Business Corporation Ashitaba International Patent Office
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