To provide a liquid supply device not mixing bubbles in liquid to be delivered.
The liquid supply device 1 includes a server tank 2 capable of pressurizing liquid L stored therein, a syringe pump 3 forming an inner space 10 by a syringe 9 and a piston 11 and moving the piston 11 backward by pressure of the liquid L to lead the liquid into the inner space 10 from the server tank 2 and moving the piston 11 forward to deliver liquid L from the inner space 10, a selector valve 6 making the inner space 10 of the syringe pump 3 communicate to either of a suction channel 5 for leading the liquid L into the inner space 10 from the server tank 2 and a delivery channel 8 for feeding the liquid L to an outside, a drive mechanism 4 capable of moving the piston 11 forward and backward and including a pusher 14 capable of moving the piston 11 forward with butting on an outside of the piston 11, and a sensor 15 detecting that the piston 11 exists in a range of fixed distance of the pusher 14.
KANBE TOSHIO
Mitsuo Tanaka
Atsushi Maeda
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