Title:
LIQUID TREATMENT APPARATUS, STERILIZING APPARATUS AND CLEANING METHOD USING IT, SURFACE TREATMENT METHOD, AND STERILIZING METHOD
Document Type and Number:
Japanese Patent JP3436733
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a liquid treatment apparatus which brings a small article having small holes such as a semi conductor article into full contact with the liquid, for example, the cleaning solution and the electloless plating solution, a sterilizing apparatus and a cleaning method using it, a surface treatment method, and a sterilizing method.
SOLUTION: The liquid treatment apparatus comprises (A) a liquid treatment tank 1, (B) a vibrating and agitating mechanism having a vibrating motor 2, an inverter to adjust the frequency of the vibrating motor, a vibrating bar 3 connected to the vibrating motor and a vibrating blade 4 fixed to the vibrating bar, (C) a porous rotatable container 11 to store the articles to be treated, and (D) a rotating motor 12 which connects the porous rotatable container in (C)able to switch to (1) a low-speed inverter of to rotate container in the liquid at the lower speed of <500 r.p.m with the axis of rotation perpendicularly, or to (2) a high-speed inverter to centrifugally separate the treatment solution by rotating the container at the high speed of ≥500 r.p.m. after the solution is removed with the axis of rotation perpendicularly, and the sterilizing apparatus and the cleaning method using it, the surface treatment method, and the sterilizing method are also provided.
Inventors:
Taisei Ryujin
Application Number:
JP2000213533A
Publication Date:
August 18, 2003
Filing Date:
July 13, 2000
Export Citation:
Assignee:
Nippon Techno Co., Ltd.
International Classes:
B08B3/10; C23C18/16; C23C22/73; C23F1/08; C23G3/00; C25D17/00; C25D21/10; H01L21/304; (IPC1-7): C23G3/00; B08B3/10; C23C18/16; C23C22/73; C23F1/08; C25D17/00; C25D21/10; H01L21/304
Domestic Patent References:
| JP7331471A | ||||
| JP8311491A |
Attorney, Agent or Firm:
Eiji Tomomatsu