Title:
LIQUIDDPHASE GROWTH APPARATUS
Document Type and Number:
Japanese Patent JPS5651823
Kind Code:
A
Abstract:
PURPOSE:To permit a large number of substrates to be produced at a time by providing upper and lower slide plate each slidably penetrating a liquid growth apparatus body, and a mounting portion on which a plurality of substrates are placed in parallel in the space inside the apparatus body between the slide plates. CONSTITUTION:A plurality of substrates 3 are placed in parallel on a substrate holder 13 in a growth chamber. Sliders 7 and 8 are penetrated through a boat body, and a liquid chamber 10 is filled with a liquid. Then, this liquid growth apparatus is heated to a given temperature. A control rod 14 is pulled in the direction of an arrow so that slits 7a are right below the liquid chamber 10 in order to allow the liquid to drop into a growth chamber 11 and to contact with the substrates 3. When the liquid growth is finished, the control rod 14 is moreover pulled in the arrow direction. This causes a hook-shaped end 7c of the slider 7 to hook and move the slider 8, so that a hole 8a is right below the growth chamber 11. During said operation, all of the liquid in the growth chamber 11 drop in a receiving chamber 12. Thus, a large number of substrates can be produced at a time.
Inventors:
SOGOU TOSHIO
YOSHIDA SUSUMU
MITSUI KOUTAROU
YOSHIDA SUSUMU
MITSUI KOUTAROU
Application Number:
JP12812879A
Publication Date:
May 09, 1981
Filing Date:
October 04, 1979
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
C30B19/06; H01L21/208; H01L33/30; (IPC1-7): C30B19/00; H01L33/00