Title:
LITHOGRAPHIC APPARATUS AND METHOD OF ILLUMINATION UNIFORMITY CORRECTION AND UNIFORMITY DRIFT COMPENSATION
Document Type and Number:
Japanese Patent JP2010278443
Kind Code:
A
Abstract:
To provide a lithographic apparatus with a uniformity collection system.
A system finger is movably configured so that it can be moved to the inside or outside of the intersection with a radiation beam to correct the intensity of respective parts of the radiation beam. The system includes a working device that is configured to be combined with a corresponding finger in the fingers to move the corresponding finger. The width of the tip of each finger is about a half of that of the working device.
Inventors:
ZIMMERMAN RICHARD CARL
VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE
KOCHERSPERGER PETER C
DOWNEY TODD R
STONE ELIZABETH
CSISZAR SZILARD ISTVAN
KUBICK FREDERICK
VLADIMIRSKY OLGA
VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE
KOCHERSPERGER PETER C
DOWNEY TODD R
STONE ELIZABETH
CSISZAR SZILARD ISTVAN
KUBICK FREDERICK
VLADIMIRSKY OLGA
Application Number:
JP2010122493A
Publication Date:
December 09, 2010
Filing Date:
May 28, 2010
Export Citation:
Assignee:
ASML HOLDING NV
ASML NETHERLANDS BV
ASML NETHERLANDS BV
International Classes:
H01L21/027; G02B19/00
Domestic Patent References:
| JP2006253186A | 2006-09-21 | |||
| JP2007207821A | 2007-08-16 | |||
| JPH11288874A | 1999-10-19 | |||
| JP2006253186A | 2006-09-21 | |||
| JP2007207821A | 2007-08-16 |
Foreign References:
| WO2007145139A1 | 2007-12-21 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki
Previous Patent: SPIN TORQUE MAGNETORESISTIVE STRUCTURE
Next Patent: METHOD OF MANUFACTURING PRINTED WIRING BOARD
Next Patent: METHOD OF MANUFACTURING PRINTED WIRING BOARD