Title:
LITHOGRAPHIC DEVICE, MANUFACTURING METHOD THEREFOR AND THE SAME MANUFACTURED BY ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2005184016
Kind Code:
A
Abstract:
To provide a lithographic projection device reducing the number of supporting projections for an item supporter and making an item level by a controllable method.
The device contains an illumination system providing the beams of a radiation, the item supporter supporting the item to be arranged in the beam path of the beams of the radiation, and a clamp clamping the item to the item supporter. A plurality of zones arranged around the item are formed to the clamp for generating a partially adjusted pressure so as to provide a partial bending moment for partially bending the item.
Inventors:
OTTENS JOOST JEROEN
COX HENRIKUS HERMAN MARIE
ZAAL KOEN JACOBUS JOHANNES MAR
COX HENRIKUS HERMAN MARIE
ZAAL KOEN JACOBUS JOHANNES MAR
Application Number:
JP2004382666A
Publication Date:
July 07, 2005
Filing Date:
December 16, 2004
Export Citation:
Assignee:
ASML NETHERLANDS BV
International Classes:
G03F7/20; H01L21/027; H01L21/683; (IPC1-7): H01L21/027; G03F7/20; H01L21/68
Attorney, Agent or Firm:
Hideto Asamura
Hajime Asamura
Toru Mori
Yukio Iwamoto
Hajime Asamura
Toru Mori
Yukio Iwamoto