Title:
リソグラフィ装置、ＥＵＶ放射発生装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP5921548
Kind Code:
B2
Inventors:
Lurop stra, eric
Swinkels, Geralds
Bühlmann, Erik
Staum, Uwe
Swinkels, Geralds
Bühlmann, Erik
Staum, Uwe
Application Number:
JP2013527524A
Publication Date:
May 24, 2016
Filing Date:
August 04, 2011
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H05G2/00; G02B26/08; H01L21/027; H01S3/00
Domestic Patent References:
| JP2004509370A | ||||
| JP2007201466A |
Foreign References:
| US20100182579 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki