Title:
リソグラフィ装置およびデバイス製造方法
Document Type and Number:
Japanese Patent JP4205621
Kind Code:
B2
Abstract:
In a projection system for EUV, the positions of mirrors are measured and controlled relative to each other, rather than to a reference frame. Relative position measurements may be made by interferometers or capacitive sensors mounted on rigid extensions of the mirrors.
Inventors:
Henrix Hermann Marie Cox
Dominicus Jacobs Petrus Adrianis Franken
Nicolas Rudolf Kempel
Engelberts Antonius Franciscus van der Pache
Martyn Johannes Verbund
Rambertus Adrians van den Wildenberg
Dominicus Jacobs Petrus Adrianis Franken
Nicolas Rudolf Kempel
Engelberts Antonius Franciscus van der Pache
Martyn Johannes Verbund
Rambertus Adrians van den Wildenberg
Application Number:
JP2004102926A
Publication Date:
January 07, 2009
Filing Date:
March 31, 2004
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G21K5/00; H01L21/027; G03F7/20; G21K5/02
Domestic Patent References:
| JP2000286189A | ||||
| JP3283420A | ||||
| JP2004266264A | ||||
| JP2004246060A |
Foreign References:
| WO1999025011A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki