Title:
基板の表側または裏側に結像するためのリソグラフィ装置、基板識別方法、デバイス製造方法、基板、およびコンピュータプログラム
Document Type and Number:
Japanese Patent JP4340638
Kind Code:
B2
Abstract:
The invention is directed to enabling substrate identification by comparing the measured distance between two features on an unidentified substrate with one or more stored distances. The one or more stored distances are the distances intended during the design of one or more substrates. The unidentified substrate is identified by a stored distance that corresponds to the measured distance. The two features are selected from a plurality of features that may be placed on a back side or a front side of a substrate. An optical system is provided for reading the features from the back side or a front side of the substrate.
Inventors:
Michael van der veen
Christianus geraldas maria de mol
Henrix Wilhelms Maria van Buell
Jacob Frederik Friso Clinker Mail
Anastasius Jacobs Anisetus Bull Insuma
Martinus Hendricks Antonius Rendels
Hubert Adrien Juan Mierlo
Christianus geraldas maria de mol
Henrix Wilhelms Maria van Buell
Jacob Frederik Friso Clinker Mail
Anastasius Jacobs Anisetus Bull Insuma
Martinus Hendricks Antonius Rendels
Hubert Adrien Juan Mierlo
Application Number:
JP2005099664A
Publication Date:
October 07, 2009
Filing Date:
March 02, 2005
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F7/20; H01L21/027; G03B27/42; G03F9/00
Domestic Patent References:
| JP5259010A | ||||
| JP9275066A | ||||
| JP2002280299A | ||||
| JP5217843A | ||||
| JP4043358A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki