Title:
LOAD DETECTOR
Document Type and Number:
Japanese Patent JP2016057266
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a load detector easy to be manufactured and improved in measurement accuracy.SOLUTION: A load detector 100 includes: a susceptor 110 formed with a cylindrical body part 111 cylindrically formed between a first end part 112 and a second end part 113; and a first shear strain gauge 221 and a second shear strain gauge 222 arranged symmetrically on a peripheral wall of a center part in a center axial direction of a cylindrical body part. The first shear strain gauge and the second shear strain gauge are a biaxial gauge capable of detecting the strain in a crossing biaxial direction, and symmetrically mounted on the cylindrical body part in an inclined state toward a detection direction of each axis; and load calculation means for calculating a load acting on the first end part in the radial direction of the cylindrical body part based on the detection part of each axis of the first shear strain gage and the output of a bridge circuit including the detection part of each axis of the second shear strain gauge.SELECTED DRAWING: Figure 5
Inventors:
SHIMOYAMA HIROSHI
Application Number:
JP2014186384A
Publication Date:
April 21, 2016
Filing Date:
September 12, 2014
Export Citation:
Assignee:
FUJI HEAVY IND LTD
International Classes:
G01L5/16
Domestic Patent References:
| JPH0485241U | 1992-07-24 | |||
| JP2013200168A | 2013-10-03 | |||
| JPH03215726A | 1991-09-20 | |||
| JPS63202419A | 1988-08-22 | |||
| JPS6179129A | 1986-04-22 | |||
| JP2013195419A | 2013-09-30 |
Foreign References:
| US5850044A | 1998-12-15 |
Attorney, Agent or Firm:
Hiroaki Inada
Atsushi Watanabe
Atsushi Watanabe