Title:
LOCAL EQUIPMENT
Document Type and Number:
Japanese Patent JP3553538
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide local equipment such as a semiconductor manufacturing device without including phosphorus compounds and boron compounds.
SOLUTION: At least a surface material of a wall constituting the local equipment, the filter medium of an air filter and a seal material for closely sealing between the filter medium and a frame consist of material without emitting organic phosphorus compounds and the boron compounds into air.
Inventors:
Sadao Kobayashi
Masayuki Imafuku
Megumi Wakayama
Masayuki Imafuku
Megumi Wakayama
Application Number:
JP2001324267A
Publication Date:
August 11, 2004
Filing Date:
July 25, 1996
Export Citation:
Assignee:
Taisei Corporation
International Classes:
E04B1/62; B01D46/00; E04F13/08; H01L21/02; (IPC1-7): B01D46/00; E04B1/62; E04F13/08; H01L21/02
Domestic Patent References:
| JP2053444U | ||||
| JP6302487A |
Attorney, Agent or Firm:
Tetsuya Mori
Yoshiaki Naito
Cui Shu Tetsu
Yoshiaki Naito
Cui Shu Tetsu