LOCAL EXHAUST SYSTEM FOR CAPTURING VOLATILE CONTAMINATION

Title:

LOCAL EXHAUST SYSTEM FOR CAPTURING VOLATILE CONTAMINATION

Document Type and Number:

Japanese Patent JP2005005703

Kind Code:

A

Abstract:

To provide a local exhaust system which can efficiently capture polluted airflow without interfering the operation of productive facilities, and can efficiently control the yield deterioration of products by occurrence of pollution without affecting an airflow environment in manufacturing process.

The local exhaust system is composed of a plurality of air collecting hoods which are provided around one side of an object, spray downwards to the other side of the object and carry volatile contamination on the object to capture the airflow generating the polluted air, a plurality of pipelines which are provided in each of the air collecting hoods and carry away the polluted air captured by the air collecting hoods, and flow rate regulating means which are provided in each of the pipelines and regulate the flow rate of the air of the pipelines.

Inventors:

HSIN WEI MING
WEI TANG SZU
SE HSIEH HSIN

Application Number:

JP2004161126A

Publication Date:

January 06, 2005

Filing Date:

May 31, 2004

Export Citation:

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Assignee:

CHUNGHWA PICTURE TUBES LTD

International Classes:

H01L21/02; B08B15/00; B08B15/02; B08B15/04; F27B17/00; F27D17/00; H01L21/00; (IPC1-7): H01L21/02

Attorney, Agent or Firm:

Atsushi Nakajima
Kato Kazunori
Katsuichi Nishimoto

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