PURPOSE: To control the quantities of exhaust air and supply air in response to the working conditions in an air-conditioned clean chamber by a method wherein the quantities of exhaust air and supply air are changed by controlling supply fans and exhaust fans in response to the operating states of productive facilities.
CONSTITUTION: The exhaust air side equips with a plurality of suction ports 52W62, which are open at various work spaces, and a plurality of exhaust branch pipes 40W50. Further, an exhaust fan 72, a throttle valve 70, a pressure detection sensor 80 and an air flow detection sensor 82 are arranged in an exhaust main pipe 64. A control unit 92 controls the rotational frequencies of the exhaust fans and of the supply fans and the openings of the throttle valves by means of signals sent from the sensors. On the other hand, as for the supply air side, the air coming in through an intake port 94 is air-conditioned at an outdoor air-conditioner 98 and further sent by a supply fan 102 to indoor air-conditioners 20 and finally supplied into a supply chamber 12. When all the productive facilities 28W38 are at work, all the suction ports are fully open and the air is exhausted at the maximum discharging rate and at the same time all the supply fans supply the air by the supplying rate corresponding to said maximum discharging rate.
TANIGUCHI TOSHIAKI
SAWARA TERUMI
HAYAKAWA NORIYUKI
YOSHITOMI TATSUO
TAKAHASHI KOUZOU
NAGATANI YOSHITERU
KAWAI HIDENAO
UMIGAMI SHIYUUICHI
NAKAGAWA YOUICHI
YAMAGAMI KAZUO
TAKIZAWA TERUO
SUZUKI TOMIO
HITACHI LTD
HITACHI KENSETSU SEKKEI KK
| JPS5798739A | 1982-06-19 |