Title:
局部的クリーン域を形成する局部高内圧形成クリーン装置
Document Type and Number:
Japanese Patent JP4458789
Kind Code:
B2
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| JPS62202947 | FAN FILTER UNIT |
Inventors:
Hiroyuki Omasa
Gonami Hideaki
Kenma Honda
Gonami Hideaki
Kenma Honda
Application Number:
JP2003278812A
Publication Date:
April 28, 2010
Filing Date:
July 24, 2003
Export Citation:
Assignee:
Toray Engineering Co., Ltd.
International Classes:
F24F7/06
Domestic Patent References:
| JP2008541U | ||||
| JP6074515A | ||||
| JP6041141U | ||||
| JP60010140U | ||||
| JP9306882A | ||||
| JP7190437A | ||||
| JP2001347124A |