Title:
ロックデバイス、ロックデバイスによってロック可能なボディ、ボディをロックする方法、調節機構、および、リソグラフィ装置
Document Type and Number:
Japanese Patent JP4639211
Kind Code:
B2
Abstract:
A locking device to lock a six degree of freedom positioned body is disclosed. The device has a clamping bushing to clamp against a surface of a bore extending through the body, a clamping ring to expand when subject to a compression force, and a lock actuator configured to cause the force to be applied so that the clamping ring expands against the clamping bushing so as to cause the clamping bushing to be pushed into contact against the surface. An adjustment mechanism to adjust a position of a body is also disclosed. The mechanism has an intermediate body on which the body is mounted and first and second adjustment elements to adjust a position of the intermediate body with respect to a fixed location in first and second directions, respectively, so that adjustment of the intermediate body is effected substantially in a plane defined by the directions.
Inventors:
Clinen, Edwin Edoard Nicolas Josephs
Application Number:
JP2007105501A
Publication Date:
February 23, 2011
Filing Date:
April 13, 2007
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
F16B1/02; H01L21/027
Domestic Patent References:
| JP2006100686A | ||||
| JP569265A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki