PURPOSE: To improve an inspection efficiency by comparing an output pattern fed from patterns to be inspected in accordance with a pattern for inspection with an expected value and specifying a fault part when the result of a comparison shows a disagreement.

CONSTITUTION: A logic simulation on a logic package 2 is executed by software simulation means 11 and, at the same time, the input pattern information of the simulation is taken out. Then, after an inspection request signal 100 is turned on, an inspection input pattern is transferred to a test pattern input unit 5 via an input pattern storing unit 8. After the completion of transfer, an inspection starting signal 101 is turned on, input values from the input unit 5 are selected by an input selector 6 and the inspection of the logic unit 14 of the package 2 is executed. When an inspection termination signal 102 is turned on the termination of the inspection, after an output pattern transfer signal 103 is turned on, an inspection output pattern is transferred from an output pattern storing unit 9 to a host computer 4. The computer 4 compares the inspection output pattern with the output pattern of the simulation by using comparison means 12.