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Title:
LOW AIR-CAPACITY DRAFT CHAMBER
Document Type and Number:
Japanese Patent JP2017213493
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a low air-capacity draft chamber capable of preventing a trouble such as electrostatic breakdown of an apparatus or malfunction of an apparatus, when allowing inflow of an air current to the inside.SOLUTION: A low air-capacity draft chamber 1, which is a low air-capacity draft chamber for sending the air to a working plane 21 of a working space 20 through an opening in order to perform a work in the working space 20, includes a static electricity removal unit 230 for removing static electricity by neutralizing static electricity in an air current L by ion, while forming the air current L for sending the air to the working plane 21 of the working space 20.SELECTED DRAWING: Figure 6

Inventors:
NAKADA MASAHITO
MATSUSHITA TOSHIYUKI
Application Number:
JP2016108079A
Publication Date:
December 07, 2017
Filing Date:
May 31, 2016
Export Citation:
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Assignee:
YAMATO SCIENT CO LTD
International Classes:
B01L1/00; F24F7/06; H01T19/04; H01T23/00; H05F3/04
Domestic Patent References:
JP2009078961A2009-04-16
JP2015009187A2015-01-19
JP2001165760A2001-06-22
Foreign References:
US20130183893A12013-07-18
Attorney, Agent or Firm:
Hidekazu Miyoshi
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu



 
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