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Title:
LOW-OXYGEN ATMOSPHERE APPARATUS
Document Type and Number:
Japanese Patent JP2013248597
Kind Code:
A
Abstract:

To provide an excellent low-oxygen atmosphere apparatus in which an atmosphere of low oxygen concentration can be achieved even without raising the temperature in the apparatus to the predetermined temperature by a heating means.

The low-oxygen atmosphere apparatus includes: a chamber (1) in which an object to be treated is stored; microwave generation means (2, 2'); a waveguide (3, 3') for transmitting the microwave generated in the microwave generation means (2, 2') to the chamber; and further, an oxygen reducing material (4, 4') which generates heat by means of the microwave to promote the reduction reaction of oxygen and to lower the oxygen concentration in the atmosphere in the chamber (1), in the chamber (1) and/or the waveguides (3, 3').


Inventors:
KONDO YUTA
Application Number:
JP2012000127194
Publication Date:
December 12, 2013
Filing Date:
June 04, 2012
Export Citation:
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Assignee:
DENSO CORP
International Classes:
B01J19/12; B23K1/008; B23K31/02; C01B13/00; F27B5/04; F27B17/00; F27D7/06; F27D11/12; H05B6/80; B23K1/19; B23K103/10
Domestic Patent References:
JPH05500940A1993-02-25
JP2004358519A2004-12-24
Attorney, Agent or Firm:
青木 篤
石田 敬
古賀 哲次
永坂 友康
加藤 憲一