To provide an excellent low-oxygen atmosphere apparatus in which an atmosphere of low oxygen concentration can be achieved even without raising the temperature in the apparatus to the predetermined temperature by a heating means.
The low-oxygen atmosphere apparatus includes: a chamber (1) in which an object to be treated is stored; microwave generation means (2, 2'); a waveguide (3, 3') for transmitting the microwave generated in the microwave generation means (2, 2') to the chamber; and further, an oxygen reducing material (4, 4') which generates heat by means of the microwave to promote the reduction reaction of oxygen and to lower the oxygen concentration in the atmosphere in the chamber (1), in the chamber (1) and/or the waveguides (3, 3').
| JPH05500940A | 1993-02-25 | |||
| JP2004358519A | 2004-12-24 |
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Kenichi Kato