Title:
LOW PERMITTIVITY FILLER, AND LOW PERMITTIVITY COMPOSITION AND LOW PERMITTIVITY FILM USING THIS
Document Type and Number:
Japanese Patent JP2007161518
Kind Code:
A
Abstract:
To provide a low permittivity filler for forming a low permittivity film having an excellent permittivity characteristic, low surface roughness, a low thermal expansion coefficient, and high tearing strength, and a low permittivity composition and a low permittivity film using this.
The low permittivity filler is composed of porous globular silica microparticles having micropores and an average diameter of primary particles of 10-100 nm.
Inventors:
KISHIMOTO ATSUSHI
HIROKADO TAKAO
HIROKADO TAKAO
Application Number:
JP2005358610A
Publication Date:
June 28, 2007
Filing Date:
December 13, 2005
Export Citation:
Assignee:
SUMITOMO OSAKA CEMENT CO LTD
International Classes:
C01B33/159; C08K7/26; C08L101/00; H01L23/14; H05K1/03
Domestic Patent References:
| JP2005213122A | 2005-08-11 | |||
| JP2001233611A | 2001-08-28 | |||
| JP2000330328A | 2000-11-30 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
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