Title:
低電力消費の排気方法及び装置
Document Type and Number:
Japanese Patent JP5769722
Kind Code:
B2
Abstract:
A pumping device and method are described. The pumping device comprises a dry rough vacuum pump equipped with a gas inlet connected to a vacuum chamber, a gas outlet leading to a conduit and an ejector. The pumping method comprises pumping gases contained in the vacuum chamber using the dry rough vacuum pump through the gas inlet, measuring electric power consumed by the dry rough vacuum pump and the pressure of the gases in the conduit, starting the ejector, when the pressure of the gases at the outlet and the electrical power consumed cross respective set point values as they rise and stopping the ejector when the electric power consumed and the pressure of the gases in the conduit at the outlet cross respective set point values as they fall.
Inventors:
Thierry Neil
Application Number:
JP2012539382A
Publication Date:
August 26, 2015
Filing Date:
October 27, 2010
Export Citation:
Assignee:
Adexen Baquium Product
International Classes:
F04B37/16; F04B49/08
Domestic Patent References:
| JP2003139055A | ||||
| JP2006037868A |
Attorney, Agent or Firm:
Soichi Takezawa
Noritsugu Nakama
Hiroyuki Mori
Noritsugu Nakama
Hiroyuki Mori