低応力、高温フィルム用多環式ポリマーに基づく感光性組成物

Title:

低応力、高温フィルム用多環式ポリマーに基づく感光性組成物

Document Type and Number:

Japanese Patent JP3721190

Kind Code:

B1

Abstract:

Vinyl addition polymer compositions, methods for forming such compositions, methods for using such compositions to form microelectronic and optoelectronic devices are provided. The vinyl addition polymer encompassed by such compositions has a polymer backbone having two or more distinct types of repeat units derived from norbornene-type monomers independently selected from monomers of Formula I: wherein each of X, m, R¹, R², R³, and R⁴is as defined herein and wherein a first type of repeat unit is derived from a glycidyl ether substituted norbornene monomer and a second type of repeat unit is derived from an aralkyl substituted norbornene monomer.

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Inventors:

Chris Apanius
Matt Apanius
Edmund Ells
Takashi Hirano
Kusunoki Junya
Robert Chic

Application Number:

JP2005136207A

Publication Date:

November 30, 2005

Filing Date:

May 09, 2005

Export Citation:

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Assignee:

Promelas, LLC

International Classes:

C08F32/00; C08F232/00; C08F234/02; C08G59/32; C08G61/06; G03F7/038; H01L21/027; (IPC1-7): C08F232/00; C08F234/02; G03F7/038

Foreign References:

WO2004006020A1

Attorney, Agent or Firm:

Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Takumi Terachi

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