To provide a low-surface energy material utilized for nano transfer printing that has advantages of high process stability, ready manufacture of materials, a low raw material cost, no generation of fine particle contamination in use processes, and the like.
One or two or more benzoxazine derivative monomers are simultaneously subjected to a thermal vulcanization reaction on the surface of a template to form a polybenzoxazine derivative thin film functioning as a release agent. The problem of adhesion at the time of separating the template from a polymer resist is dissolved by a mechanism that the release agent molecule decreases the surface free energy, and therefore a better-transferred pattern is obtained. As the benzoxazine derivative monomers dissolve in a solvent perfectly, the problem of fine particle formation is prevented. As the benzoxazine derivatives do not form by-products in a reaction process, contamination is effectively reduced.
CHANG FENG-CHIH
WANG CHIH-FENG
