To provide a low voltage micro switch which is driven by low voltage, precisely performs the on/off control, is easy to handle, and facilitates accumulation with a circuit part.

The low voltage micro switch has a substrate 100 with a drive space 101 formed in an internal predetermined area by etching, a drive unit 110 which is formed by projecting in a cantilever-like from a part of the substrate 100 to the drive space 101 side, and equipped with a piezoelectric matter and a bias electrode, and a conductive signal line 120 which is formed extending from the substrate 100 so as to have a predetermined interval with the substrate 100, and partially disconnected. Additionally, it is connected to the drive unit 110 and positioned on the drive space 101, and includes a support unit 130 moving by the drive of the drive unit 110, a switching part 140 turning on/off the disconnection part of the conductive signal line 120 by the moving of the support unit 130, and at least not less than one of grounding part 150 formed on the substrate 100.