To easily prepare a test program by mounting a compile part for generating an inspection program of test programming language by using the determined data on a device under test(DUT), and the like.

Items of DUT inspection specification is registered in a registered DUT data part by every kind of DUT. An inspection DUT data setting means 19 successively inputs items of every DUT stored in a DUT data part 40 in an interactive mode, and determines and edits the inspection DUT data 28. For example, an inspection DUT signal control part 20, a timing control part 22 and a sequence control part 24 are mounted corresponding to the input items. A compile part 30 compiles the inspection DUT data 18 as the main program data generated by the inspection DUT signal control part 20, the timing control part 22 and the sequence control part 24. Whereby an inspection program of test program language (for example, summit language) is automatically generated.