PURPOSE: To provide a lubricant film which is thin in a film thickness to the extent of nanometer, excellent in gliding durability, a travelling property, and abrasion resistance, and has a self-lubricating property by a method wherein a chemical adsorption film containing a carbon chain organic molecule is formed on a substrate surface by covalent bonding with the substrate surface, and an organic compound containing a carbon chain is formed on the surface by physical adsorption.

CONSTITUTION: For example, CF3(CH2)18 SiCl3 is used as a chemical adsorbent molecule. Its non-aqueous solution is brought into contact with a substrate 1, and a chemical adsorption film 2 is formed by a dehydrochlorination reaction. Then, a surface of the chemical adsorption film is coated with a chloroform solution of a long chain hydrocarbon fatty acid ester compound: CH3(CH2)17 COOCH3, and a physical adsorption film 3 is formed.