To provide a lubricating composition for a chuck sliding part having improved frictional properties and durability which enable securing the improvement on the gripping force and the stability of a chuck.

The lubricating composition for a chuck sliding part comprises a grease composed of a base oil and a thickening agent and an inorganic powder which accounts for 15-65 wt.% of the total amount of the grease and the inorganic powder. The inorganic powder which is used has a primary particle diameter or an average particle diameter of about 0.1-50 μm, preferably about 0.5-20 μm (provided that when the inorganic powder is silicon oxide, the average particle diameter is about 1-50 nm, preferably 5-40 nm).

COPYRIGHT: (C)2008,JPO&INPIT