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Title:
LUMINOUS FLUX SPLITTING APPARATUS, SPATIAL OPTICAL MODULATION UNIT, LIGHTING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2011114041
Kind Code:
A
Abstract:

To provide a luminous flux splitting apparatus capable of guiding luminous flux having a desired intensity distribution to a plurality of spatial optical modulators without depending upon an intensity distribution of incident luminous flux.

The luminous flux splitting apparatus includes a spatial optical modulator (30) for splitting which includes a plurality of optical elements (30a) arrayed in a predetermined plane and individually controlled so as to split the incident luminous flux into two pieces of luminous flux and to guide first luminous flux along a first optical path and second luminous flux along a second optical path, and a driving section (30c) configured to drive the plurality of optical elements, and drives the driving section according to a control signal from a control section (CR). The spatial optical modulator for splitting is so controlled by the control section so that light passed through optical elements in a first group among the plurality of optical elements is guided along the first optical path and light passed through optical elements in a second group different from the first group among the plurality of optical elements is guided along the second optical path.


Inventors:
TANITSU OSAMU
Application Number:
JP2009266889A
Publication Date:
June 09, 2011
Filing Date:
November 25, 2009
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B5/08; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Takao Yamaguchi