Title:
ＭＥＭＳ加速度計
Document Type and Number:
Japanese Patent JP5933510
Kind Code:
B2
Abstract:
Micro Electro-Mechanical Systems (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass suspended by at least one hinge type flexure, at least one planar coil located on the proof mass, and at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane. In an example embodiment, the angle is approximately 45 degrees. The at least one magnet may include a first annular magnet positioned on a first side of the poof mass and a second annular magnet positioned on a second side of the proof mass. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.
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Inventors:
Paul W Dwyer
Application Number:
JP2013239546A
Publication Date:
June 08, 2016
Filing Date:
November 20, 2013
Export Citation:
Assignee:
Honeywell International Inc.
International Classes:
G01P15/13
Domestic Patent References:
| JP5425583B2 | ||||
| JP9243658A | ||||
| JP743377A | ||||
| JP10335675A | ||||
| JP2002350459A | ||||
| JP2003519797A |
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Yukio Kanegae
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Yukio Kanegae