Title:
MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2022115414
Kind Code:
A
Abstract:
To solve problems of thermal demagnetization that an MEMS device including a hard magnetic body having a plurality of magnetization regions differing in a magnetization direction has.SOLUTION: A method of manufacturing an MEMS device 1 includes irradiating, after housing a hard magnetic body 22 in a housing body 10, the hard magnetic body 22 with laser light 43 through the housing body 10 while a magnetic field 42 is applied so as to locally magnetize the hard magnetic body 22. Thus, laser magnetization is carried out after the hard magnetic body 22 is housed in the housing body 10, so thermal demagnetization of the hard magnetic body 22 having been magnetized can be prevented.SELECTED DRAWING: Figure 3
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Inventors:
SUJIRAWA YOSHIMOTO
SUZUKI KENICHI
SUZUKI KENICHI
Application Number:
JP2021011996A
Publication Date:
August 09, 2022
Filing Date:
January 28, 2021
Export Citation:
Assignee:
TDK CORP
International Classes:
B81B3/00; B81C1/00; H01F13/00
Attorney, Agent or Firm:
Mitsuhiro Washito
Ogata Japanese
Ogata Japanese