Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
A MEMS device which increased back capacity
Document Type and Number:
Japanese Patent JP2016521036
Kind Code:
A
Abstract:
微小電気機械システム（ＭＥＭＳ）マイクアセンブリが、基部及びカバーを含む。カバーは、基部に結合されて基部と共にキャビティを定める。基部は、凹部を形成し、凹部は、ＭＥＭＳダイを保持するような寸法及び形状を有する。ＭＥＭＳダイは、ダイアフラム及びバックプレートを含む。【選択図】図２

Inventors:
Conklin Wade
Application Number:
JP2016505509A
Publication Date:
July 14, 2016
Filing Date:
March 21, 2014
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Knowles Electronics, Limited Liability Company
International Classes:
H04R19/04; B81B7/02; H01L23/04; H01L29/84
Domestic Patent References:
JP2009253891A2009-10-29
JP2007158044A2007-06-21
JP2009038053A2009-02-19
JP2001054196A2001-02-23
JP2013533122A2013-08-22
Foreign References:
US20080298621A12008-12-04
WO2011144570A12011-11-24
US20070176272A12007-08-02
US20090274324A12009-11-05
US6594369B12003-07-15
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuhiko Suzuki



 
Previous Patent: Activity reduction of the harmonics noise from a plurality of slewing mechanisms

Next Patent: The method, the system, and the medium that can be computer read for performing stateful Diameter ro...