Title:
ＭＥＭＳ素子およびその製造方法
Document Type and Number:
Japanese Patent JP6405276
Kind Code:
B2
Inventors:
Shinichi Araki
Application Number:
JP2015066248A
Publication Date:
October 17, 2018
Filing Date:
March 27, 2015
Export Citation:
Assignee:
New Japan Radio Co., Ltd.
International Classes:
B81B3/00; B81C1/00; H04R19/04; H04R31/00
Domestic Patent References:
| JP9043083A | ||||
| JP2011055087A | ||||
| JP2014533983A |
Foreign References:
| EP2211156A2 | ||||
| US20100072561 |