Title:
MEMS素子
Document Type and Number:
Japanese Patent JP4231062
Kind Code:
B2
Abstract:
A micro-electro-mechanical system (MEMS) includes a first electrode interposed between a first fixed end and a second fixed end, the first electrode being movable by an actuator element. The MEMS also includes a substrate on which the first and second fixed ends are located. The MEMS further includes a second electrode formed on the substrate to face the first electrode. A shape from the first electrode to the first fixed end and a shape from the first electrode to the second fixed end are asymmetrical, the first electrode to be lowered to the second electrode.
Inventors:
Tamio Ikehashi
Application Number:
JP2006134011A
Publication Date:
February 25, 2009
Filing Date:
May 12, 2006
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
B81B3/00; H01H57/00; H01H59/00
Domestic Patent References:
| JP2001250997A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto