Title:
ＭＥＭＳ素子
Document Type and Number:
Japanese Patent JP7240289
Kind Code:
B2
Abstract:
According to one embodiment, a MEMS element includes a base body, a supporter, a film part, a first electrode, a second electrode, and an insulating member. The supporter is fixed to the base body. The film part is separated from the base body in a first direction and supported by the supporter. The first electrode is fixed to the base body and provided between the base body and the film part. The second electrode is fixed to the film part and provided between the first electrode and the film part. The insulating member includes a first insulating region and a second insulating region. The first insulating region is provided between the first electrode and the second electrode. A first gap is provided between the first insulating region and the second electrode. The second insulating region does not overlap the first electrode in the first direction.
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Inventors:
Fumitaka Ishibashi
Naofumi Nakamura
Hiroaki Yamazaki
Tomohiro Saito
Tomohiko Nagata
Katsura Masuzai
Yoshihiko Kurui
Naofumi Nakamura
Hiroaki Yamazaki
Tomohiro Saito
Tomohiko Nagata
Katsura Masuzai
Yoshihiko Kurui
Application Number:
JP2019148370A
Publication Date:
March 15, 2023
Filing Date:
August 13, 2019
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
B81B3/00; G01L9/00; H01L29/84
Domestic Patent References:
| JP2007203420A | ||||
| JP2008098609A |
Foreign References:
| US5677965 |
Attorney, Agent or Firm:
Hyuga Temple Masahiko
Junichi Kozaki
Hiroshi Ichikawa
Satoshi Shirai
Uchida Keito
Takeuchi Isao
Junichi Kozaki
Hiroshi Ichikawa
Satoshi Shirai
Uchida Keito
Takeuchi Isao