Title:
ＭＥＭＳ周波数チューニングばね
Document Type and Number:
Japanese Patent JP6881532
Kind Code:
B2
Abstract:
A microelectromechanical system with at least one partly mobile mass element which is suspended from a fixed support by one or more suspension units. Each suspension unit comprises first springs which extend from the fixed support to the partly mobile mass element, and second springs which also extend from the fixed support to the partly mobile mass element. Each second spring is substantially parallel and adjacent to one first spring. The first springs are electrically isolated from the second springs, and the microelectromechanical system comprises a voltage source configured to apply a frequency tuning voltage between the one or more first springs and the one or more second springs.
Inventors:
Matty Riuk
Application Number:
JP2019166227A
Publication Date:
June 02, 2021
Filing Date:
September 12, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
B81B7/02; B81B3/00; H01L29/84
Domestic Patent References:
| JP2011203228A | ||||
| JP2014027693A | ||||
| JP2013003187A | ||||
| JP2015099270A |
Foreign References:
| US20140183669 | ||||
| DE102016014001A1 |
Attorney, Agent or Firm:
Shuichi Yoshikawa
Masao Sakajima
Masao Sakajima